Title:
ワックスレスマウント式研磨装置
Document Type and Number:
Japanese Patent JP4013187
Kind Code:
B2
Inventors:
Saito Takeo
Uchida Takahiro
Sato Taira
Uchida Takahiro
Sato Taira
Application Number:
JP2001388170A
Publication Date:
November 28, 2007
Filing Date:
December 20, 2001
Export Citation:
Assignee:
Sumco inc.
International Classes:
H01L21/304; B24B37/04; B24B37/30; B24B37/32
Domestic Patent References:
| JP2001044151A | ||||
| JP2001169843A | ||||
| JP2000094311A | ||||
| JP2001319903A |
Attorney, Agent or Firm:
Ichiro Abe