Title:
ワックスレスマウント式研磨装置
Document Type and Number:
Japanese Patent JP4019349
Kind Code:
B2
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Inventors:
Saito Takeo
Uchida Takahiro
Sato Taira
Uchida Takahiro
Sato Taira
Application Number:
JP2001388169A
Publication Date:
December 12, 2007
Filing Date:
December 20, 2001
Export Citation:
Assignee:
Sumco inc.
International Classes:
H01L21/304; B24B37/04; B24B37/30; B24B37/32
Domestic Patent References:
| JP2000061826A | ||||
| JP4118968U | ||||
| JP9267257A | ||||
| JP7031260U | ||||
| JP11170165A |
Attorney, Agent or Firm:
Ichiro Abe