Title:
気相軸付成長用反応容器及びその製造方法
Document Type and Number:
Japanese Patent JP4023713
Kind Code:
B2
Inventors:
Shoji Takahashi
Naoya Okazaki
Naoya Okazaki
Application Number:
JP2001333785A
Publication Date:
December 19, 2007
Filing Date:
October 31, 2001
Export Citation:
Assignee:
Yamagata Shinetsu Quartz Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
C03B8/04; C03B20/00; C03C3/06
Domestic Patent References:
| JP7101741A | ||||
| JP4310530A | ||||
| JP9067130A |
Attorney, Agent or Firm:
Heihachi Hattori