Title:
単結晶保持装置
Document Type and Number:
Japanese Patent JP4026695
Kind Code:
B2
Inventors:
Kurosaka Nori
Junsuke Tomioka
Masakazu Kobayashi
Yoshimoto Akihiro
Oshishitoshi
Kazuhiro Mimura
Hiroshi Kadota
Hiroshi Yoshinada
Kenji Okamura
Junsuke Tomioka
Masakazu Kobayashi
Yoshimoto Akihiro
Oshishitoshi
Kazuhiro Mimura
Hiroshi Kadota
Hiroshi Yoshinada
Kenji Okamura
Application Number:
JP6197998A
Publication Date:
December 26, 2007
Filing Date:
February 27, 1998
Export Citation:
Assignee:
sumco tech xiv Co., Ltd.
International Classes:
C30B15/30; C30B29/06
Domestic Patent References:
| JP10081582A | ||||
| JP11130586A |
Attorney, Agent or Firm:
Takahisa Kimura
Yoshiyuki Obata
Yoshiyuki Obata