Title:
ポジ型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP4037018
Kind Code:
B2
Inventors:
Kazuyoshi Mizutani
Application Number:
JP29860599A
Publication Date:
January 23, 2008
Filing Date:
October 20, 1999
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/075; H01L21/027; G03F7/004; G03F7/039
Domestic Patent References:
| JP11218927A | ||||
| JP10324748A | ||||
| JP8022125A | ||||
| JP5011450A | ||||
| JP2003518524A |
Attorney, Agent or Firm:
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
Kiyozumi Yazawa
Toshimitsu Ichikawa
Takeshi Takamatsu
Kiyozumi Yazawa