Title:
圧電フィルタ、デュプレクサ、複合圧電共振器および通信装置、並びに、圧電フィルタの周波数調整方法
Document Type and Number:
Japanese Patent JP4039322
Kind Code:
B2
Abstract:
A piezoelectric filter and other electronic components are constructed such that the accuracy of frequency adjustment can be increased and an improvement in efficiency of the adjustment operation can be achieved. The piezoelectric filter includes a plurality of piezoelectric resonators including a substrate and a vibration portion provided on the substrate, the vibration portion having a structure in which the top and bottom surfaces of a thin film portion including at least one piezoelectric thin film are sandwiched between at least a pair of an upper electrode and a lower electrode facing each other, wherein the upper electrode of a predetermined piezoelectric resonator is made of a material having susceptibility to etching that is different from that of the upper electrode of the other piezoelectric resonator.
Inventors:
Yoshihiko Goto
Yamada Hajime
Tadashi Nomura
Masaki Takeuchi
Yamada Hajime
Tadashi Nomura
Masaki Takeuchi
Application Number:
JP2003175235A
Publication Date:
January 30, 2008
Filing Date:
June 19, 2003
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H01L41/09; H03H9/58; H01L41/08; H01L41/18; H01L41/22; H01L41/23; H01L41/253; H01L41/29; H03H3/02; H03H3/04; H03H9/02; H03H9/17; H03H9/56; H03H9/70
Domestic Patent References:
| JP3046504A | ||||
| JP2001326553A | ||||
| JP2002204143A | ||||
| JP2001251160A | ||||
| JP9064683A | ||||
| JP5315881A | ||||
| JP61013809A | ||||
| JP58121815A | ||||
| JP2001251159A | ||||
| JP2001024476A | ||||
| JP2001196882A | ||||
| JP2001177365A | ||||
| JP2001502136A | ||||
| JP2000068783A | ||||
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Foreign References:
| WO2001091289A1 |
Attorney, Agent or Firm:
Kazuhide Okada