Title:
基板の処理装置
Document Type and Number:
Japanese Patent JP4040270
Kind Code:
B2
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Inventors:
Masatoshi Deguchi
Yuichiro Miyata
Yuichiro Miyata
Application Number:
JP2001191918A
Publication Date:
January 30, 2008
Filing Date:
June 25, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G03F7/16; H01L21/304; H01L21/027
Domestic Patent References:
| JP1298720A | ||||
| JP2001053051A | ||||
| JP8261648A | ||||
| JP1231046A | ||||
| JP62160691U | ||||
| JP11195635A | ||||
| JP10064875A | ||||
| JP7078743A | ||||
| JP2000058498A | ||||
| JP11233481A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara