Title:
薬液塗布方法とその装置
Document Type and Number:
Japanese Patent JP4043163
Kind Code:
B2
Inventors:
Hiroyuki Saito
Katsutomo Iwamura
Katsutomo Iwamura
Application Number:
JP36751499A
Publication Date:
February 06, 2008
Filing Date:
December 24, 1999
Export Citation:
Assignee:
M Setec Co., Ltd.
International Classes:
B05C11/08; B05D1/40; B05D7/00; G03F7/16; G03F7/30; H01L21/027
Domestic Patent References:
| JP7308625A | ||||
| JP11333357A | ||||
| JP6210441U | ||||
| JP63193572U | ||||
| JP217268U |
Attorney, Agent or Firm:
Yoshiaki Mori