Title:
MIS型半導体装置およびその製造方法
Document Type and Number:
Japanese Patent JP4047492
Kind Code:
B2
Inventors:
Kazumi Nishinohara
Application Number:
JP18073899A
Publication Date:
February 13, 2008
Filing Date:
June 25, 1999
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L29/78
Domestic Patent References:
| JP5259453A | ||||
| JP7106562A | ||||
| JP6077480A | ||||
| JP63288065A | ||||
| JP8018049A | ||||
| JP9246547A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai