Title:
載置台の除電機構及び検査装置
Document Type and Number:
Japanese Patent JP4048412
Kind Code:
B2
Abstract:
A charge eliminating mechanism of the invention includes a mechanical switching mechanism (e.g., a POGO pin), and a wiring line so connected as to be able to be electrically connected to the POGO pin. The wiring line can include a resistor. A block holds the POGO pin. The POGO pin comes into contact with a charge eliminating plate provided on a stage, so that the static electricity of the stage is discharged to ground.
Inventors:
Nobuto Suehira
Misawa Yumune
Misawa Yumune
Application Number:
JP2002014559A
Publication Date:
February 20, 2008
Filing Date:
January 23, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R31/26; H01L21/66; H01L21/683; H05F3/02
Domestic Patent References:
| JP1158372A | ||||
| JP11145266A | ||||
| JP2001343755A |
Attorney, Agent or Firm:
Hajime Ohara