Title:
エッチング方法
Document Type and Number:
Japanese Patent JP4050113
Kind Code:
B2
Inventors:
Atsushi Tominaga
Miyashita Masaaki
Masanori Ozawa
Toshio Hayashi
Miyashita Masaaki
Masanori Ozawa
Toshio Hayashi
Application Number:
JP2002259645A
Publication Date:
February 20, 2008
Filing Date:
September 05, 2002
Export Citation:
Assignee:
Mitutoyo Corporation
ULVAC, Inc.
ULVAC, Inc.
International Classes:
H01L21/3065
Domestic Patent References:
| JP2000138201A | ||||
| JP2000114246A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe