Title:
半導体発光装置およびその製造方法
Document Type and Number:
Japanese Patent JP4056347
Kind Code:
B2
Abstract:
In a semiconductor light emitting device including a mesa section having at least a sandwich structure of an n-type clad layer, an active layer and a p-type clad layer which are constituted by compound semiconductor layers formed on a substrate, and an inorganic insulating film 22 formed to cover the mesa section excluding a contact region, the inorganic insulating film is constituted by an inorganic insulating film having a vacancy rate of 50% or more.
Inventors:
Hiroshi Sai Exhibition
Yoshiaki Oku
Yoshiaki Oku
Application Number:
JP2002286995A
Publication Date:
March 05, 2008
Filing Date:
September 30, 2002
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01S5/183; H01S5/227; H01L27/15; H01S5/042; H01S5/22
Domestic Patent References:
| JP1256184A | ||||
| JP2002270959A | ||||
| JP2001118841A | ||||
| JP2231781A | ||||
| JP2002217190A | ||||
| JP10194720A | ||||
| JP9227249A | ||||
| JP8034607A |
Attorney, Agent or Firm:
Shohei Oguri
Hironori Honda
Toshimitsu Ichikawa
Hironori Honda
Toshimitsu Ichikawa