Title:
基板の搬送・排出装置および基板の搬送・排出方法
Document Type and Number:
Japanese Patent JP4057793
Kind Code:
B2
Inventors:
Shinichi Ogimoto
Application Number:
JP2001109885A
Publication Date:
March 05, 2008
Filing Date:
April 09, 2001
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
G02F1/1345; H01L21/60; G09F9/00
Domestic Patent References:
| JP4352442A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka
Hideyuki Mori
Hirohito Katsunuma
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka
Hideyuki Mori
Hirohito Katsunuma