Title:
非接触位置検出センサ及びそれを用いた測定装置
Document Type and Number:
Japanese Patent JP4057874
Kind Code:
B2
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Inventors:
Yoshio Saruki
Application Number:
JP2002291318A
Publication Date:
March 05, 2008
Filing Date:
October 03, 2002
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/00; G01B11/14
Domestic Patent References:
| JP58129307A | ||||
| JP2002206914A | ||||
| JP2000105114A | ||||
| JP4264206A |
Attorney, Agent or Firm:
Yuji Iwahashi