Title:
レーザ装置用主放電電極の製造方法
Document Type and Number:
Japanese Patent JP4059758
Kind Code:
B2
Inventors:
Tsukasa Hori
Akira Sumitani
Akira Sumitani
Application Number:
JP2002341607A
Publication Date:
March 12, 2008
Filing Date:
November 26, 2002
Export Citation:
Assignee:
KOMATSU LTD.
International Classes:
H01S3/038
Domestic Patent References:
| JP2001332786A | ||||
| JP2001313432A | ||||
| JP9246673A | ||||
| JP3231480A |