Title:
シリコン基板とその製造方法
Document Type and Number:
Japanese Patent JP4061418
Kind Code:
B2
Inventors:
Kosuke Asai
Takashi Fujikawa
Takashi Fujikawa
Application Number:
JP21799896A
Publication Date:
March 19, 2008
Filing Date:
July 30, 1996
Export Citation:
Assignee:
Sumco inc.
International Classes:
H01L21/205; H01L21/322
Domestic Patent References:
| JP6163556A | ||||
| JP6466932A | ||||
| JP4162533A | ||||
| JP737893A |
Attorney, Agent or Firm:
Ichiro Abe