Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4068175
Kind Code:
B2
Inventors:
Osamu Yamazaki
Application Number:
JP29672796A
Publication Date:
March 26, 2008
Filing Date:
November 08, 1996
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C23C16/511; H05H1/46; C23C16/44; C23C16/455; C23C16/50; H01L21/302; H01L21/3065
Domestic Patent References:
| JP7106258A | ||||
| JP2285075A | ||||
| JP63070526A | ||||
| JP4013658U |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto