Title:
ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4073253
Kind Code:
B2
Inventors:
Kazuyoshi Mizutani
Shinichi Kanna
Shinichi Kanna
Application Number:
JP2002158821A
Publication Date:
April 09, 2008
Filing Date:
May 31, 2002
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F16/14; C08F20/10; C08F212/14; C08F214/00; C08F220/42; C08F232/08; H01L21/027
Domestic Patent References:
| JP2002131913A | ||||
| JP2002146333A | ||||
| JP2002145962A | ||||
| JP2000159758A | ||||
| JP2001328964A | ||||
| JP2001302735A | ||||
| JP10171108A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa