Title:
X線回折装置
Document Type and Number:
Japanese Patent JP4074874
Kind Code:
B2
Abstract:
An X-ray diffraction apparatus allows plural kinds of characteristic X-rays to be incident on a sample (40) at the same time and thus allows X-ray diffraction measurement with the plural kinds of characteristic X-rays to be carried out at the same time. An X-ray tube (10) includes an anode (22) which has the first target region (24) made of Co and the second target region (26) made of Cu. The first and second target regions (24, 26) are sectioned in a direction (Z-direction) perpendicular to an X-ray take-off direction. Incident-side and receiving-side Z-direction-divergence restriction devices (14, 18) restrict the X-ray divergence in the Z-direction. An X-ray detector (20) is position sensitive at least in the Z-direction and can detect separately a diffracted X-ray coming from the first region of sample (66) which is irradiated with the Co characteristic X-ray and another diffracted X-ray coming from the second region of sample (68) which is irradiated with the Cu characteristic X-ray. The detector (20) may be a two-dimensional CCD sensor (20) capable of executing a TDI operation.
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Inventors:
Takeyoshi Taguchi
Kuribayashi Masaru
Kuribayashi Masaru
Application Number:
JP2005191046A
Publication Date:
April 16, 2008
Filing Date:
June 30, 2005
Export Citation:
Assignee:
Rigaku Corporation
International Classes:
G01N23/207; G21K1/06; G21K5/08; H01J35/10
Domestic Patent References:
| JP11304728A | ||||
| JP968507A | ||||
| JP200591142A | ||||
| JP200239970A | ||||
| JP200314894A | ||||
| JP200398126A | ||||
| JP2559701B2 | ||||
| JP2000146872A | ||||
| JP583122B2 | ||||
| JP2005515474A | ||||
| JP2005158474A | ||||
| JP2000292379A |
Attorney, Agent or Firm:
Toshiyuki Suzuki