To provide a deflector that can accurately deflect a charged particle beam.
This deflector which deflects the charged particle beam is provided with a substrate having an opening formed for passing the charged particle beam, a first and a second deflecting electrodes provided in the opening to face each other for deflecting the charged particle beam, and first and second conductive layers provided in the opening to face each other in a direction which is almost perpendicular to the direction toward the second deflecting electrode from the first deflecting electrode and formed of materials having higher conductivity than the material of the substrate has. The deflector is also provided with first and second insulating layers respectively provided between the first and second deflecting electrodes and the substrate.
COPYRIGHT: (C)2004,JPO
Yoshiaki Moro
Tamamori Kenji
Yuichi Iwasaki
Yoshinori Nakayama
キヤノン株式会社
株式会社日立製作所
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