Title:
試料寸法測定方法及び荷電粒子線装置
Document Type and Number:
Japanese Patent JP4078257
Kind Code:
B2
Abstract:
A method and apparatus for efficiently executing two types of measurements with an optical measuring device and a scanning electron microscope are provided. For example, the method and apparatus may execute the following steps: calculating an average of the dimensional values of a plurality of scanned feature objects; and calculating an offset of a dimensional value on the basis of a difference between the calculated average value and the dimensional value of the feature object obtained when the light is irradiated. The offset between measurement values between the optical measuring device and the scanning electron microscope can be determined precisely.
Inventors:
Kenji Watanabe
Tadashi Otaka
Ryo Nakagaki
Chie Shishido
▲高▼橋 正和
Yuya Toyoshima
Tadashi Otaka
Ryo Nakagaki
Chie Shishido
▲高▼橋 正和
Yuya Toyoshima
Application Number:
JP2003183715A
Publication Date:
April 23, 2008
Filing Date:
June 27, 2003
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01B11/24; G01B15/04; G01B21/02; G01N21/47; G01N23/225; H01J37/28; H01L21/66
Domestic Patent References:
| JP2003294436A | ||||
| JP2001133417A |
Attorney, Agent or Firm:
Manabu Inoue