Title:
ビームアライメント装置
Document Type and Number:
Japanese Patent JP4093651
Kind Code:
B2
Inventors:
Minoru Yokoyama
Kiyoto Owaki
Kiyoto Owaki
Application Number:
JP27124698A
Publication Date:
June 04, 2008
Filing Date:
September 25, 1998
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
International Classes:
G01T1/29; G21K1/093
Domestic Patent References:
| JP4262298A | ||||
| JP3020700A | ||||
| JP5181000A | ||||
| JP62140400A | ||||
| JP6003498A | ||||
| JP10189299A |
Attorney, Agent or Firm:
Masaharu Seki