Title:
干渉計用基準レンズ
Document Type and Number:
Japanese Patent JP4094301
Kind Code:
B2
Abstract:
A reference lens for an interferometer is constructed so that light transmitted by a partially reflecting reference spherical surface may be converged, toward a focal point that coincides with the center of curvature of the reference spherical surface, and reflected from a subject spherical surface that also has its center of curvature at the focal point. Measurement of the shape of the subject spherical surface is possible based on the interference of two light beams, one reflected by the subject spherical surface and one reflected by the reference spherical surface. The reference lens, which may include five or six lens components or lens elements, includes a negative meniscus lens component, a positive lens group, and a positive lens component. Specified conditions are satisfied to provide a reference lens that has favorable correction of aberrations, is compact, and can measure the surface accuracy of a wide range of convex spherical surfaces.
Inventors:
Hideo Kanda
Application Number:
JP2002029195A
Publication Date:
June 04, 2008
Filing Date:
February 06, 2002
Export Citation:
Assignee:
Fujinon Co., Ltd.
International Classes:
G02B13/00; G02B9/60; G02B9/62
Domestic Patent References:
| JP2000346613A |
Attorney, Agent or Firm:
Yasushi Santanzaki
Yoichiro Fujishima
Yoichiro Fujishima