Title:
センサ素子の製造方法
Document Type and Number:
Japanese Patent JP4095643
Kind Code:
B2
Inventors:
Toru Baba
Manji Kataoka
Takashi Saijo
Kazukazu Miyajima
Takashi Okudo
Hirotsugu Goto
Manji Kataoka
Takashi Saijo
Kazukazu Miyajima
Takashi Okudo
Hirotsugu Goto
Application Number:
JP2006089588A
Publication Date:
June 04, 2008
Filing Date:
March 28, 2006
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
G01C19/56; B81C3/00; G01C19/5762; G01C19/5769; G01P15/08; G01P15/12; G01P15/18; H01L29/84
Domestic Patent References:
| JP200485547A | ||||
| JP200591166A | ||||
| JP263173A | ||||
| JP2004364041A | ||||
| JP2004209585A | ||||
| JP2005191556A | ||||
| JP2005127750A |
Other References:
伊藤寿浩,須賀唯知,「MEMS実装の課題と常温接合」,エレクトロニクス実装学会誌,2001年,Vol.4,No.1,p.25-27
須賀唯知,「マイクロマシンの接合技術」,塑性加工シンポジウム,2002年,221th,p.15-20
須賀唯知,「マイクロマシンの接合技術」,塑性加工シンポジウム,2002年,221th,p.15-20
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori