Title:
表面性状測定機の校正用治具、表面性状測定機の校正方法、表面性状測定機の校正プログラムおよびこの校正プログラムを記録した記録媒体
Document Type and Number:
Japanese Patent JP4098649
Kind Code:
B2
More Like This:
Inventors:
Yukihiro Sakata
Nobuyuki Hama
Naoji Horiuchi
Nobuyuki Hama
Naoji Horiuchi
Application Number:
JP2003075529A
Publication Date:
June 11, 2008
Filing Date:
March 19, 2003
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B5/00; G01B5/20
Domestic Patent References:
| JP10267641A | ||||
| JP2000258150A | ||||
| JP9329402A |
Attorney, Agent or Firm:
Intellectual Property Office
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki