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Title:
ボロン除去用フィルタ及び汚染気体浄化方法
Document Type and Number:
Japanese Patent JP4100744
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the selectivity and the efficiency of removing boron by forming a filter for removing a pollutant from a pollution gas containing boron and thereby cleaning the gas, of a filter layer containing a resin fiber with a plurality of hydroxyl groups. SOLUTION: A polluted air is sucked by a blower 14 through a grating 11 provided on a floor surface 15, in a clean room 1. In addition, a cleaning unit consisting of an active carbon layer 12 and a strong ion exchange fiber layer 13 is provided in an air circulating path 16 from the floor surface 15 to the blower 14. Further, on the ceiling part of the clean room 1, an HEPA filter 2 of glass fiber is mounted to supply a clean air through the blower 14. In this case, the filter 2 for removing boron is formed of a filter layer containing a resin fiber with a plurality of hydroxyl groups. Thus, it is possible to remove the boron component contained in a pollution gas at a high rate of removal.

Inventors:
Fujiwara Goro
Mitsunobu Masuda
Shinji Hattori
Iwao Yoshizawa
Application Number:
JP35931197A
Publication Date:
June 11, 2008
Filing Date:
December 26, 1997
Export Citation:
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Assignee:
Dan Takuma Co., Ltd.
International Classes:
B01D39/16; B01D53/46; B01D39/14; B01J47/12; F24F7/06
Domestic Patent References:
JP7136450A
JP9053848A
JP8024534A
JP6198123A
JP5111607A
JP7194911A
JP5285234A
JP8168628A
Attorney, Agent or Firm:
Shuichiro Kitamura