Title:
処理方法及び処理装置
Document Type and Number:
Japanese Patent JP4108465
Kind Code:
B2
Inventors:
Akihiro Kikuchi
Yasuharu Sasaki
Yasuharu Sasaki
Application Number:
JP2002366237A
Publication Date:
June 25, 2008
Filing Date:
December 18, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065
Domestic Patent References:
| JP11026563A | ||||
| JP2000252261A | ||||
| JP2001504160A |
Foreign References:
| WO2002031219A1 |
Attorney, Agent or Firm:
Saichi Suyama