Title:
ダイピックアップ装置
Document Type and Number:
Japanese Patent JP4119691
Kind Code:
B2
Inventors:
Ryuichi Komatsu
Yoshio Ichikawa
Tomizawa Teruo
Yoshio Ichikawa
Tomizawa Teruo
Application Number:
JP2002168535A
Publication Date:
July 16, 2008
Filing Date:
June 10, 2002
Export Citation:
Assignee:
Hitachi High-Tech Instruments Co., Ltd.
International Classes:
H01L23/00; H01L21/02
Domestic Patent References:
| JP2001267797A | ||||
| JP3019846A | ||||
| JP5261898A | ||||
| JP5154989A | ||||
| JP2001110819A | ||||
| JP2001274596A | ||||
| JP11260974A |
Attorney, Agent or Firm:
Kiyotaka Aizawa