Title:
ワークを加熱または冷却するための装置と、その製造方法
Document Type and Number:
Japanese Patent JP4133958
Kind Code:
B2
Abstract:
A heater unit comprises a shaft member and a plate member. The shaft member has a body and a flange portion formed on an end portion of the shaft body. The plate member is formed by brazing a plurality of plate elements together. One of the plate elements has a recess in which the flange portion is inserted. A gap is formed between a peripheral surface of the flange portion and an inner peripheral surface of the recess. An end face of the flange portion is brazed to the plate element in a manner such that the flange portion is inserted into the recess and the flange portion is loaded and heated by a pressurizing jig.
Inventors:
Atsushi Niguchiya
Toshihiro Tachikawa
Toshihiro Tachikawa
Application Number:
JP2004228395A
Publication Date:
August 13, 2008
Filing Date:
August 04, 2004
Export Citation:
Assignee:
Nippon Barber Co., Ltd.
International Classes:
H01L21/02; H01L21/683
Domestic Patent References:
| JP2004207465A | ||||
| JP2004152865A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto