Title:
窒化ガリウム系化合物半導体
Document Type and Number:
Japanese Patent JP4140595
Kind Code:
B2
Inventors:
Norikatsu Koide
Application Number:
JP2004287064A
Publication Date:
August 27, 2008
Filing Date:
September 30, 2004
Export Citation:
Assignee:
Toyoda Gosei Co., Ltd.
International Classes:
H01L21/205; H01L33/06; H01L33/12; H01L33/32; H01S5/343
Domestic Patent References:
| JP2005020025A | ||||
| JP5267175A | ||||
| JP9008349A | ||||
| JP9167875A | ||||
| JP9181000A | ||||
| JP5343741A | ||||
| JP2004056051A | ||||
| JP11145516A |
Attorney, Agent or Firm:
Osamu Fujitani