Title:
化合物半導体装置
Document Type and Number:
Japanese Patent JP4147441
Kind Code:
B2
Inventors:
Sawada Ken
Application Number:
JP19547599A
Publication Date:
September 10, 2008
Filing Date:
July 09, 1999
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/28; H01L29/812; H01L21/338
Domestic Patent References:
| JP62224083A | ||||
| JP6084967A | ||||
| JP4368135A | ||||
| JP9331066A | ||||
| JP2186634A | ||||
| JP57120380A |
Attorney, Agent or Firm:
Manabe Kiyoshi
Shoji Kashiwaya
Koichi Watanabe
Toshiro Ito
Shoji Kashiwaya
Koichi Watanabe
Toshiro Ito