Title:
差動電圧測定装置、半導体試験装置
Document Type and Number:
Japanese Patent JP4152676
Kind Code:
B2
Abstract:
There is provided a semiconductor testing apparatus comprising a current measuring portion which converts a load current quantity at the time of application of a relatively high test voltage to a DUT to fall within a low-voltage range, and then subjects the low-voltage range to quantization conversion with a predetermined measurement resolution even when the relatively high test voltage is applied to the DUT. This is a differential voltage measuring apparatus comprising: an applied voltage source which applies a predetermined constant voltage to a load device; current/voltage converting means for directly inserting a predetermined resistance between an output end of the applied voltage source and the load device, and converts a quantity of a current flowing through the load device into a voltage; and current measuring means which switches and receives a common mode voltage and a detection voltage in time series, shifts the received voltages to predetermined low voltages, and outputs low-voltage measurement data obtained by receiving each of the shifted voltages and subjecting this voltage to quantization conversion.
Inventors:
Yoshihiro Hashimoto
Application Number:
JP2002172556A
Publication Date:
September 17, 2008
Filing Date:
June 13, 2002
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01R19/00; G01R31/28; G01R19/10; G01R31/30
Domestic Patent References:
| JP10221402A | ||||
| JP4015797A | ||||
| JP7321655A | ||||
| JP11271364A | ||||
| JP2000035466A | ||||
| JP2000221217A |
Attorney, Agent or Firm:
Akihiro Ryuka