Title:
エピタキシャルウエハの製造方法
Document Type and Number:
Japanese Patent JP4156873
Kind Code:
B2
Inventors:
Hideki Tezuka
Tadashige Sato
Tadashige Sato
Application Number:
JP2002193850A
Publication Date:
September 24, 2008
Filing Date:
July 02, 2002
Export Citation:
Assignee:
Mitsubishi Chemical Corporation
International Classes:
C30B29/40; H01L33/30
Domestic Patent References:
| JP60155598A | ||||
| JP48096462A |
Attorney, Agent or Firm:
Jiro Kobe