Title:
単結晶成長装置
Document Type and Number:
Japanese Patent JP4159141
Kind Code:
B2
Inventors:
Kentaro Iribe
Application Number:
JP17948398A
Publication Date:
October 01, 2008
Filing Date:
June 26, 1998
Export Citation:
Assignee:
IHI Aerospace Co., Ltd.
International Classes:
C30B1/02; C30B30/08
Domestic Patent References:
| JP6227899A | ||||
| JP9087093A | ||||
| JP7010675A | ||||
| JP4338195A | ||||
| JP4182382A |