Title:
ガス検知方法およびガスセンサ
Document Type and Number:
Japanese Patent JP4164580
Kind Code:
B2
Abstract:
The invention provides a gas detection method and a gas sensor which utilize an amount of change in the electrical characteristic of a gas sensitive thin film with respect to the adsorption amount of a gas to be detected. The gas sensitive thin film ( 7 ) having characteristic detection electrodes ( 5, 6 ) functioning as a sandwich electrode or a gap electrode is laid out on a crystal resonator ( 10 ), and change in the electrical characteristic of the gas sensitive thin film ( 7 ) with respect to the adsorption amount of the detection target gas is observed by simultaneously determining change in the oscillatory frequency of the crystal resonator ( 10 ) and the electrical characteristic of the gas sensitive thin film ( 7 ). Because the sensor is an integral type device, both changes in an adsorption mass and the electrical characteristic can be surely monitored.
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Inventors:
Shinpo Kazushige
Kaneko Twins
Keizo Kato
Yasuo Ohira
Takahiro Kawakami
Masahiro Minagawa
Kaneko Twins
Keizo Kato
Yasuo Ohira
Takahiro Kawakami
Masahiro Minagawa
Application Number:
JP2006529055A
Publication Date:
October 15, 2008
Filing Date:
July 12, 2005
Export Citation:
Assignee:
Niigata University
International Classes:
G01N27/12; G01N5/02; G01N27/04
Domestic Patent References:
| JP11507729A | ||||
| JP5281177A | ||||
| JP4236349A | ||||
| JP2003014723A |
Attorney, Agent or Firm:
Mamoru Ushiki
Masayoshi Yoshida
Koji Matsuura
Shimizu Sakaematsu
Masayoshi Yoshida
Koji Matsuura
Shimizu Sakaematsu