Title:
ウエハエッジ研磨装置
Document Type and Number:
Japanese Patent JP4176562
Kind Code:
B2
Inventors:
Takuchi
Kenichi Konishi
Sato Satoru
Kenichi Konishi
Sato Satoru
Application Number:
JP2003174209A
Publication Date:
November 05, 2008
Filing Date:
June 19, 2003
Export Citation:
Assignee:
Japan Micro Coating Co., Ltd.
International Classes:
B24B9/00; B24B21/00; B24B21/16; H01L21/304
Domestic Patent References:
| JP11099458A | ||||
| JP8174399A | ||||
| JP9076148A | ||||
| JP5329759A | ||||
| JP200293755A |
Attorney, Agent or Firm:
Akira Hori
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