Title:
表面形状および/または膜厚測定方法およびその装置
Document Type and Number:
Japanese Patent JP4183089
Kind Code:
B2
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Inventors:
Ogawa Hidemitsu
Yoshihiro Nakano
Mutsumi Hayashi
Kitagawa
Sugiyama
Yoshihiro Nakano
Mutsumi Hayashi
Kitagawa
Sugiyama
Application Number:
JP2004269737A
Publication Date:
November 19, 2008
Filing Date:
September 16, 2004
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
National University Corporation Tokyo Institute of Technology
National University Corporation Tokyo Institute of Technology
International Classes:
G01B11/24; G01B9/02; G01B11/06
Domestic Patent References:
| JP2003065722A | ||||
| JP2001066122A | ||||
| JP5248817A | ||||
| JP2004361218A |
Other References:
小川英光、中野渡祥裕、北川克一、杉山将,位相シフト法による透明膜に覆われた物体の3次元形状測定,2004年度精密工学会秋季大会学術講演会講演論文集,日本,社団法人精密工学会,2004年 9月 1日,1125-1126
Attorney, Agent or Firm:
Tsutomu Sugiya