Title:
微細加工光-流量ガスセンサ
Document Type and Number:
Japanese Patent JP4183285
Kind Code:
B2
Abstract:
A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.
Inventors:
Arrich, Bonn
Cole, Barrett Yee
Higashi, Robert Y
Cole, Barrett Yee
Higashi, Robert Y
Application Number:
JP54739098A
Publication Date:
November 19, 2008
Filing Date:
April 29, 1998
Export Citation:
Assignee:
Honeywell Incorporated
International Classes:
G01N21/03; G01N21/17; G01N21/35; G01N21/37
Domestic Patent References:
| JP9043051A | ||||
| JP9089773A | ||||
| JP9127066A |
Foreign References:
| DE4116280A1 | ||||
| WO1996024831A1 | ||||
| WO1995022045A1 |
Attorney, Agent or Firm:
Masaki Yamakawa
Hiroro Kurokawa
Masayuki Konno
Osamu Nishiyama
Jiro Suzuki
Shigeki Yamakawa
Hiroro Kurokawa
Masayuki Konno
Osamu Nishiyama
Jiro Suzuki
Shigeki Yamakawa