Title:
荷電粒子ビーム露光方法及び荷電粒子ビーム露光装置
Document Type and Number:
Japanese Patent JP4191705
Kind Code:
B2
Inventors:
Kozo Ogino
Application Number:
JP2005202185A
Publication Date:
December 03, 2008
Filing Date:
July 11, 2005
Export Citation:
Assignee:
Fujitsu Microelectronics Limited
International Classes:
G03F7/20; H01L21/027
Domestic Patent References:
| JP58068928A | ||||
| JP60100426A | ||||
| JP7211607A | ||||
| JP62021215A | ||||
| JP2210814A | ||||
| JP57083030A |
Attorney, Agent or Firm:
Kenji Doi
Hayashi Tsunetoku
Hayashi Tsunetoku