Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4198944
Kind Code:
B2
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Inventors:
Hiroyuki Kitazawa
Yoshiyuki Nakagawa
Yoshiyuki Nakagawa
Application Number:
JP2002162785A
Publication Date:
December 17, 2008
Filing Date:
June 04, 2002
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B05C5/02; H01L21/027
Domestic Patent References:
| JP2001224997A | ||||
| JP9253555A | ||||
| JP7256186A | ||||
| JP2000140740A | ||||
| JP2001310152A | ||||
| JP10328600A | ||||
| JP6142588A | ||||
| JP2001259500A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita