Title:
プラズマ処理装置及びプラズマ点灯方法
Document Type and Number:
Japanese Patent JP4221847
Kind Code:
B2
Abstract:
A plasma treatment apparatus can generate atmospheric pressure plasma with reliability by help of an ignition electrode to facilitate starting the apparatus without using an expensive impedance matching device. The apparatus comprises a plasma-generation chamber having an aperture from which the plasma blows out, a gas supply unit for supplying a gas for plasma generation into the chamber, a pair of electrodes, a power source for applying an AC electric field between the electrodes to maintain the plasma in the chamber, a pulse generator for providing a pulse voltage, and the ignition electrode for applying the pulse voltage to the gas supplied in the chamber to generate the plasma.
Inventors:
Noriyuki Taguchi
Keiichi Yamazaki
Kazuya Kitayama
Yasushi Sawada
Keiichi Yamazaki
Kazuya Kitayama
Yasushi Sawada
Application Number:
JP30311599A
Publication Date:
February 12, 2009
Filing Date:
October 25, 1999
Export Citation:
Assignee:
Panasonic Electric Works Co., Ltd.
International Classes:
H05H1/30; H05H1/24
Domestic Patent References:
| JP11260597A | ||||
| JP9069397A | ||||
| JP3067496A | ||||
| JP9250986A | ||||
| JP9232293A | ||||
| JP61085800A | ||||
| JP10214698A | ||||
| JP11016696A | ||||
| JP9092493A | ||||
| JP10199697A |
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori