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Title:
汚染ウェーハの作成方法および作成装置
Document Type and Number:
Japanese Patent JP4231184
Kind Code:
B2
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Inventors:
Harumi Shibata
Kiyoshi Nagai
Application Number:
JP2000046055A
Publication Date:
February 25, 2009
Filing Date:
February 23, 2000
Export Citation:
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Assignee:
sumco tech xiv Co., Ltd.
International Classes:
G01N1/00; H01L21/66; G01N1/28; G01N33/00; H01L21/304
Domestic Patent References:
JP4326548A
JP7169810A
JP3030352A
Attorney, Agent or Firm:
Takahisa Kimura
Yoshiyuki Obata



 
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