Title:
抵抗加熱ボートの製造方法
Document Type and Number:
Japanese Patent JP4234681
Kind Code:
B2
Abstract:
Disclosed herein are a resistance-heated boat and a manufacturing method thereof for use in vacuum vapor deposition of a metal evaporant onto a substrate in a resistance heating manner. The boat comprises a graphite block to be formed into a boat, and a protective barrier formed at the graphite surface for preventing the graphite layer from reacting with the metal evaporant. The protective barrier has an aluminum-rich layer, and a nitrogen containing compound layer. According to the present invention, it is possible to achieve stable and continuous evaporation of metals including aluminum.
Inventors:
Jae-Inn, John
Tae Goon, Rim
Tae Goon, Rim
Application Number:
JP2004562083A
Publication Date:
March 04, 2009
Filing Date:
December 01, 2003
Export Citation:
Assignee:
RESEARCH INSTITUTE OF INDUSTRIAL SCIENCE & TECHNOLOGY
International Classes:
C23C14/24; C23C14/26; H01J9/22
Domestic Patent References:
| JP52102681A | ||||
| JP54101781A | ||||
| JP58077572A | ||||
| JP6306585A |
Attorney, Agent or Firm:
Masago Onishi
Nobuyuki Yamaguchi
Nobuyuki Yamaguchi