Title:
多層石英ガラス管及び多層石英ガラス棒の製造方法
Document Type and Number:
Japanese Patent JP4236037
Kind Code:
B2
Inventors:
Makoto Mitani
Yuki Katahata
Yamada Sadanobu
Keigo Nakajima
Takeshi Nishise
Yuki Katahata
Yamada Sadanobu
Keigo Nakajima
Takeshi Nishise
Application Number:
JP2003361922A
Publication Date:
March 11, 2009
Filing Date:
October 22, 2003
Export Citation:
Assignee:
OHARA CORPORATION
International Classes:
C03B20/00; H01L21/205; H01L21/22
Domestic Patent References:
| JP7033478A | ||||
| JP2003192365A | ||||
| JP6007238U | ||||
| JP3001528A | ||||
| JP2003137581A |
Attorney, Agent or Firm:
Mikiji Sugioka
Chihara
Chihara