Title:
ポジ型レジスト組成物およびレジストパターン形成方法
Document Type and Number:
Japanese Patent JP4242317
Kind Code:
B2
Inventors:
Akiyoshi Yamazaki
Kazuo Tani
Naoto Motoike
Satoshi Maemori
Sachiko Yoshizawa
Kazuo Tani
Naoto Motoike
Satoshi Maemori
Sachiko Yoshizawa
Application Number:
JP2004119494A
Publication Date:
March 25, 2009
Filing Date:
April 14, 2004
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/039; G03F7/004; G03F7/033; H01L21/027
Domestic Patent References:
| JP2001272782A | ||||
| JP2000227658A | ||||
| JP2000086584A | ||||
| JP2002055452A | ||||
| JP10306120A | ||||
| JP2001142199A | ||||
| JP2001274062A | ||||
| JP11119443A | ||||
| JP2004333548A |
Foreign References:
| WO2004059392A1 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Noriko Yanai
Masatake Shiga
Suzuki Mitsuyoshi
Noriko Yanai