Title:
透明基板の表面検査方法及び検査装置
Document Type and Number:
Japanese Patent JP4243837
Kind Code:
B2
Inventors:
Yuichi Shimoda
Noboru Kato
Noboru Kato
Application Number:
JP2003069649A
Publication Date:
March 25, 2009
Filing Date:
March 14, 2003
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01N21/958; G02F1/13; G02F1/1333
Domestic Patent References:
| JP5013917A | ||||
| JP2002175520A | ||||
| JP9127010A | ||||
| JP9189641A | ||||
| JP10100036A | ||||
| JP2002257738A |
Foreign References:
| WO2003006971A1 |
Attorney, Agent or Firm:
Shunji Kagei