Title:
半導体装置およびその製造方法
Document Type and Number:
Japanese Patent JP4244566
Kind Code:
B2
Inventors:
Kazuhiko Yamamoto
Application Number:
JP2002159097A
Publication Date:
March 25, 2009
Filing Date:
May 31, 2002
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/28; H01L21/8234; H01L21/8238; H01L27/088; H01L27/092
Domestic Patent References:
JP2002110930A | ||||
JP2000307010A | ||||
JP2001102443A | ||||
JP2000100966A | ||||
JP2001308318A | ||||
JP2001203276A | ||||
JP2002151666A | ||||
JP2002076335A |
Attorney, Agent or Firm:
Fumio Iwahashi
Hiroki Naito
Daisuke Nagano
Hiroki Naito
Daisuke Nagano