Title:
ベースライン制御スクリプトを用いてツールを制御するための方法および装置
Document Type and Number:
Japanese Patent JP4261190
Kind Code:
B2
Abstract:
A method for controlling a manufacturing system includes processing workpieces in a plurality of tools; initiating a baseline control script for a selected tool of the plurality of tools; providing context information for the baseline control script; determining a tool type based on the context information; selecting a control routine for the selected tool based on the tool type; and executing the control routine to generate a control action for the selected tool. A manufacturing system includes a plurality of tools adapted to process workpieces, a control execution manager, and a control executor. The control execution manager is adapted to initiate a baseline control script for a selected tool of the plurality of tools and provide context information for the baseline control script. The control executor is adapted to execute the baseline control script, determine a tool type based on the context information, select a control routine for the selected tool based on the tool type, and execute the control routine to generate a control action for the selected tool.
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Inventors:
Christopher A. Board
Alexander J. Pasadine
Anthony Jay Toplac
Joyce S. Oui Hewitt
Anastasia Ochelski Peterson
Thomas Jay. Sonderman
Michael Elle Miller
Alexander J. Pasadine
Anthony Jay Toplac
Joyce S. Oui Hewitt
Anastasia Ochelski Peterson
Thomas Jay. Sonderman
Michael Elle Miller
Application Number:
JP2002568120A
Publication Date:
April 30, 2009
Filing Date:
October 22, 2001
Export Citation:
Assignee:
ADVANCED MICRO DEVICES INCORPORATED
International Classes:
H01L21/02; G05B19/042; G05B19/418
Domestic Patent References:
| JP10086040A | ||||
| JP61019548A |
Attorney, Agent or Firm:
Masatake Suzuki
Ryota Sano
Yoshito Muramatsu
Ryota Sano
Yoshito Muramatsu