Title:
真空ポンプの故障診断装置及び故障診断方法
Document Type and Number:
Japanese Patent JP4261252
Kind Code:
B2
Inventors:
Kiyoshi Yanagisawa
Tomonori Ohashi
Tomonori Ohashi
Application Number:
JP2003171844A
Publication Date:
April 30, 2009
Filing Date:
June 17, 2003
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B51/00; F04C25/02; F04B37/16; F04B49/06; F04D19/04
Domestic Patent References:
| JP9072539A | ||||
| JP8179410A | ||||
| JP2049984A | ||||
| JP2000110735A |
Attorney, Agent or Firm:
Takashi Kumagai
Yu Takagi
Yu Takagi
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