Title:
加熱装置
Document Type and Number:
Japanese Patent JP4264073
Kind Code:
B2
Inventors:
Uematsu Tadayuki
Takashi Chiba
Terada Masao
Isao Sakaguchi
Takashi Chiba
Terada Masao
Isao Sakaguchi
Application Number:
JP2005158839A
Publication Date:
May 13, 2009
Filing Date:
May 31, 2005
Export Citation:
Assignee:
Alpha Oikos Co., Ltd.
International Classes:
H01L21/268
Domestic Patent References:
JP2007504669A | ||||
JP2003158089A | ||||
JP2008529259A | ||||
JP2006295068A | ||||
JP2006330071A |
Foreign References:
US20060221459 |
Attorney, Agent or Firm:
Seiichi Sawaki
Kiichi Sawaki
Kiichi Sawaki